Protoflex
Product Development System
Model No. RGCLGN-150
ProtoFlex’s patented cluster tool configuration* is designed for easy management of multiple, isolated processes. The compact footprint and modular chamber design allow for flexibility in both placement and process design.
With a low cost of ownership and minimal particulate generation, ProtoFlex’s Product Development System provides a cost-effective solution for your processing requirements.
*Patented under U.S. patent No. 5,773,088
Features
- Cluster configuration (up to 6 modules)
- Automatic transport
- Clean-room compatible
- Easily expandable
- Minimal particulate contamination
- Base pressures < 1 x 10-7 Torr
- 304 Stainless steel construction
- Substrates up to 6” x 6”
- Up to six gas channels per module
Applications
- Photovoltaics
- Thin film batteries
- RF ID antennae
- Sensors
- Medical technologies
- Thin film electronics
Processes
- Sputtering
- PECVD
- Etching
