Large Area Roll to Roll Deposition System

Model No. RRMP-609

The RRMP-609 Large Area Roll to Roll Deposition System provides high volume processing of flexible substrates up to 24” in width.  Configurations are available with five modular internal processing zones, which enable heating and cooling for a variety of thin film process steps. Capable of incorporating multiple processes, the RRMP-609 is a great system for ramping your production capability.

Features

  • Base pressures of 5 x 10-7 Torr
  • 304 stainless steel fabrication
  • Compact footprint
  • Multiple process capabilities, including sputtering, PECVD, thermal evaporation and e-beam evaporation
  • Upward/sideways deposition
  • Five modular processing zones
  • High throughput
  • Fully automated controls
  • Minimal set-up time
  • Internal cooling  and heating plates

Applications

  • Photovoltaics
  • Thin film batteries
  • RF ID antennae
  • Sensors
  • Medical technologies
  • Thin film electronics