Large Area In-Line Production System

Model No. RGINMP-2448

In-line production offers optimal flexibility for high volume system growth. The RGINMP-2448 system is ideal for deploying multiple sequential processes in a production environment — without breaking vacuum. The base system includes one load lock and one process chamber; additional process and load lock chambers can be added to address your specific application needs. Upward deposition provides highly uniform films with minimal particulates.

Features

  • Base pressures of 1 x 10-6 Torr
  • 304 Stainless steel fabrication
  • Automated system control
  • Minimal particulates
  • Upward or downward deposition
  • Easily expandable
  • Highly uniform deposition

Processes

  • PECVD (plasma enhanced chemical vapor deposition)
  • Sputtering
  • CVD (chemical vapor deposition)
  • Etching
  • Thermal evaporation
  • E-beam evaporation

Applications

  • Photovoltaics
  • Thin film batteries
  • RF ID antennae
  • Sensors
  • Other thin film electronics
  • Substrate sizes up to 1m x 1m